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MRC 603 SPUTTERING Tool N°4
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Wafer Size 6 inch MRC 603 Ta/Al-Al/Cu Gas Used: AR
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ACRO CHILLER
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ACRO CHILLER
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300MM DUAL HE CVD SHOWER HEAD
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YASKAWA ROBOT
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HEAT PROBER
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PRTEUS SIGNAL CONDITIONER ASSY
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CONTROLLER MANIPULATOR
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INTERFACE
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ORIENTER LIFTER CONTROLLER
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HEAT EXCHANGER
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