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2008 TEL Trias
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2008 TEL Trias CVD PECVD-Oxynitride WAFER SIZE: 12
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JUSUNG SDP-ALD NIT
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4 JUSUNG SDP-ALD NIT 12 Thin Film ALD SiN/SiO WAFER SIZE: 12
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2010 WONIK IPS AKRA
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2010 WONIK IPS AKRA CVD Ti/TiN
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