Akrion Gamma

Wafer size: 8"

Configuration overview: ST28, PSR, QDR, SD

Process overview: solvent

Tool status: Offline, Working, Some missing parts, Crated

Module Box 1: QDR and EE wash Modules - 92x48x97

Module Box 2: Tank 3 and Tank 4 Modules - 92x48x97

Module Box 3: Tank 1 and Tank 2 Modules - 92x48x97

Frame: Mini-environment frame and skins - 72x48x88

Dryer: Sumitomo Dryer - 40x30x36

Dryer Control Cabinet: Sumitomo Dryer Controller - 29x18x51

Sink Control Cabinet: Main Sink Control Cabinet - 40x30x76

Bus Bar: Electrical Bus Connection - 105x8x11

Table: 2ea Lift tables and 1 Queue table - 54x44x38

Miscellaneous: Cables, sonic controllers, dryer fire suppression alarm - 36x36x48

Blowers 1: 3ea mini-environment blowers - 60x42x72

Blower 2: 3ea mini-environment blowers - 60x42x72

Robot Rail 1: Robot rail with robot - 46x36x60

Robot Rail 2: Robot rail - 174x24x44