2001 Santa Clara Plastic SCP EVOLUTION 200 (E200)

Vintage: 2001

Wafer size: 8"

Condition: as is

- Load/Unload: Dual SMIF Arm with Wafer Transfer System (LRL process flow)

- Module Sulfuric

- Module Hot QDR + Megasonic

- Module SC1

- Module HF diluted

- Module QDR

- Module BHF

- Modules 7/8: End.Effector Wash and Dry + SCP Green Dryer