2007 Rudolph Technologies, Inc. S3000A

Vintage: 2007

Wafer size: 300mm

Install Type: Stand-Alone

Can Produce Wafers As-Is: Yes

CE Mark Certified: Yes

Are any Manuals included: No

Overall Tool Condition

Any Field Modifications: No

All Cables present: Yes

Any Corrosion visible on modules: No

Any Missing / Damaged Parts : No

Shipping Brackets Included : No

Wafer Handler

Handler Type:EFEM, 2 WIDE M122 SYSTEM. P/N:AUA0023A

# of Cassette / FOUP Loaders: 2

Robot Type:Yaskawa. XU-RC400M-D03

End-Effecter Type:VGEE,(Packaged) Vac Grip. W/O:Mapping, 140W, 186L

Pre-Aligner: No

Mini-Environment:Yes

Handler Options: No

System SW (OS) version:Microsoft Windows XP Professional Version 2002 SP2

System SW (App): version:5.2.0.1

Log-In User Name:Mfg

Log-In Password:mfg

Any SW Options:No

SEMI Std Options (E84, E99, etc..):E84, E99

Power Supply: No

AC Dist Box: No

Ext Transformer: No

UPS: No

Heat Exchanger / Chiller: No

Backing Pump(s): No

Facility Requirements

CDA:5.27 ~ 6.33( kg/cm2 )

DIW:None

Vacuum:508+-76 (-)mmHg

Gas: None

Power:200/220VAC 60HZ 50 Amps

Tool Damage/Missing Parts: 

Please inspect tool to reconfirm

Dry pumps not included