NIKON AMI-3300

Wafer size: 300mm

Tool has been de-installed and is stored in an off-site warehouse.

A Hard Disk Drive will be removed from tool.

Main SWV：Ver5.30

Light source：Deep UV Lamp,Metal halide Lamp

Wave Length：E-Line ～ 248nm,VIS

Minimum Line Width：55nm

PPH：160W/h