2005 TEL CLEAN TRACK LITHIUS

Vintage: 2005

Currently Configured for: 300mm

Asset HDD not included

•4x FOUP (25 wafers)

•Left to Right

•High speed IBFM

•4x Coat Modules

RGEN02 pumps (4ml type)

7x resist nozzles

Resist temp control

Top side EBR

RRC pre wet

•4x Develop Modules

1 SH nozzle

Top side rinse

Develop temp control

•2x ADH

•4x HCP (high speed CPL)

•4x LHP (low hot plate)

•9x CPHP (chilling high precision hot plate)

•2x WCPL (water chilling plate)

•1x IHCP

•1x CWH (cup wash holder)

•1x BWEE

•2x TRS

•2x Cup T&H control units

•1x Develop External chemical box

•ASML interface