2007 Applied Materials eMax CT plus

Vintage: 2007

Wafer size: 12

 Turbo pump- Alcatel ATH 1600M

Bias RF (13.5 MHz)- Daihen RMN-50N1 (amat p/n : 0190-15322)

LF Bias RF (2 MHz) -Daihen RMN-50N1 (amat p/n : 0190-15322)

Source RF (60 MHz)- Daihen AMN-30H (amat p/n : 0190-15323)

Gate valve- Nor-Cal / NC-95-PP

RF Generator

13.56 MHz- ENI GHW-50A (amat p/n : 0190-15319)

2 MHz- ENI B-5002 (amat p/n : 0190-15320)

60 HHz- AE Ovation 2760 (amat p/n : 0190-17779)

FIB- eFib, wFib (Facilities Interface Box)

Chamber Equip Cart- amat p/n : 0010-24353