2001 TEL UNITY SCCM
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Description
Vintage: 2001
Wafer size: 8"
Configuration overview: 2ch SCCM:
Process overview: Dry Etch Metal AL (1)
Dry Etch Oxide (1)
Tool status: running
Specifications
| Manufacturer | TEL |
| Model | UNITY SCCM |
| Year | 2001 |
| Condition | Used |
| Stock Number | BM387 |