2007 TEL TRIAS

Vintage 2007

Wafer size: 300mm

➢ *HDD will not be sold with this tool*

➢ Tel Trias CVD Deposition

➢ (4) Chamber Ti / TiCl Process

➢ (3) Load Ports

➢ Gases Used: Ticl4, CLF3, NH3, N2, H2, A