2008 SEZ Lam Research SP203

Still installed - Warm shutdown.

Working Condition.

Wafer : 8 Inches.

Vintage : 2008.

It's complete with HDD and Software included

50/60 Hz

400 VAC

Max Current : 32 A

Breaking Capacity: 10.000 AIC

Process pump in one chemical cabinet (sub tool) has malfunction.