AMAT Precision Implant 9500
AMAT Precision Implant 9500
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Description
High Current Implanter
Ion Implanters
Currently Configured for: 200mm
Software: 3.02-01X
Groovy belt
RTV
Gas box/MFC: 4, ASH3, PH3, BF3, Ar
Dry Pumps:
(2) Leybold NT1000, (2) CT10 dumb pump
Chillers:
AMAT heat exchanger
Specifications
| Manufacturer | AMAT |
| Model | Precision Implant 9500 |
| Condition | Used |
| Stock Number | BM5228 |