Axcelis / Eaton NV GSD 200 Implanter
Axcelis / Eaton NV GSD 200 Implanter
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Description
- 208 V
- 3 phase
- 50/60 Hz
- Power: 35 kVa
- Output:160 kVe
- Current: 20 ma
- Plasma Shower
- Direct Drive
- Cell V6
- Solaris
- SDS Gas Box
Specifications
| Manufacturer | Axcelis / Eaton |
| Model | NV GSD 200 Implanter |
| Condition | Used |
| Stock Number | BM5226 |