2007 Axcelis Technologies Inc. RapidStrip 210ES

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Date of Manufacture: 2007-12-31

Currently Configured for: 200mm

Part Number 1080-6037

Original Ship Date from OEM 2007

Software Version 1.8.7.0.06

Is System On-Line? Yes  

CE Mark Certified? Yes  

OEM Audit Available? No

Decontamination Report Exists? No

Can Produce Wafers AS IS? Yes  

Any Known Field Modifications? No

All Cables Present? Yes  

System Configuration System Type RapidStrip 210 ES  

Number of Cassettes 2

Load Type Standard 

Install Type Through-the-Wall

Mini-Environment No

Robot Type Brooks

Endpoint Detection Type Monochromator

Throttle Valve MKS

Foreline Valve VAT

Cooling Station Y

SECS/GEMS Yes  

Ozone/Microwave Generator Details

Chamber Position  Mfgr.   Model 1 Matrix 3kw switchmode powergen

Included: Pump: IQDP 80 + QMB1200 Mechanical Booster