Zeiss ULTRA 55 with 2017 Oxford X-Act Detector

Software: Inca Suite, Version 5.05

EHT Power: 30keV

Resolution:

1.0 nm at 15 kV

1.7 nm at 1 kV

4.0 nm at 0.1 kV

Electronic Source: Thermal Field Emission Gun (FEG) with stability greater than 0.2%/h.

Acceleration Voltage: Variable from 20 V to 30 kV.

Probe Current: Adjustable between 4 pA and 30 nA.

Integrated detectors:

In-lens SE detector for high contrast images of the surface.

EsB (Energy selective Backscattered) detector with filter grid for compositional information.

AsB (Angle selective Backscattered) detector for BSE imaging at short working distances.

5-axis motorized sample stage:

X and Y-axis movements: 130 mm.

Z-axis movement: 50 mm.

Inclination: -3° to 70°.

Rotation: 360° continuous.

Control software: Based on Windows 10 64 bit, SmartSEM as user software.

EDX:

OXFORD INCA x-act

Model 51-ADD0011

Sensor 51-1385-046

Vintage 2017