2006 ASML PAS 5500/1150C 200mm

Year 2006

Condition Used/See Description

ASML PAS 5500/1150 C Wafer Stepper, NC# 9428.999.60820-URS, w/ 2x2 cassette/transfer loader. Mfg 2006. Includes: 1ea Cymer NL7600A NanoLith laser system, 400V, 70A, s/n 02C4683402, mfg 2002; 1ea mains power cabinet; 1ea Donaldson P199100 LithoGuard filtration unit, s/n D0634001; 1ea Rietschle Thomas SAH 55 (10) exhaust blower; 1ea Rietschle Thomas REL 44050 (23) exhaust blower cabinet; 1ea Quality Power Solutions uninterruptible power system w/ battery pack; 1ea Powervar ABC75.0-48D40Y 2000 Series GPI power conditioner, 75kVA. 120in x 72in x 99in H.