Glen Technologies (Yield Engineering) R3A 500W low frequency Plasma Asher

PLC controlled and offers real-time plain English readout of system operating parameters together with remedial action in the event of an abort. 

Active Plasma for routine cleaning of sample surfaces

RIE Plasma for aggressive cleaning of non ESD sensitive samples

Downstream, Electron-Free Plasma for cleaning sensitive electronic components 

The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence 

Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz

Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays

3 Plasma Modes: 

   ACTIVE PLASMA for routine cleaning of sample surfaces

   RIE PLASMA for aggressive cleaning of non-ESD sensitive samples

   DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components

Gas Inputs: dual gas inputs with needle valves, PLC-controlled

Computer Interface: RS 232 interface

Power Requirements: 110Volt

Full Load Current Rating: 13 Amp