2017 KLA TENCOR 2367

BrightField Inspection tool

25 cassette HW 200mm

GEM/SECS and HSMS Model

Enable .12 , .62, .39 Picels

ORS Upgrade done 

Tool currently full installed at cleanroom

Other Information Tool still maintained within Basic-Maintenance contract by KLA!

Condition Excellent

Year of Manufacture 2017

Power Requirements 208 V   16.0 A   50/60 Hz   3 Phase

CE Marked YES

Exterior Dimensions   Width 2,375.000  in  (6,032.5 cm)  

Depth 1,332.000  in  (3,383.3 cm)  

Height 2,134.000  in  (5,420.4 cm)

Weight 5,037  lb  (2,285 kg)