Applied Materials Endura PVD 5500 - 200mm Metal deposition

Vintage: 1992

Wafersize: 200mm

Dimensions & weight estimates:

Mainframe dim (cm): 127 x 96 x 89

Mainframe weight (kg): 3400

Bypack1 dim (cm): 53 x 44 x 94

Bypack1 weight (kg): 800

Bypack2 dim (cm): 62 x 56 x 77

Bypack2 weight (kg): 600

Bypack3 dim (cm): 62 x 56 x 77

Bypack3 weight (kg): 630

Bypack4 dim (cm): 52 x 34 x 36

Bypack4 weight (kg): 270

Bypack5 dim (cm): 38 x 38 x 47

Bypack5 weight (kg): 130

Bypack6 dim (cm): 96 x 48 x 72

Bypack6 weight (kg): 500

Sputter1 Endura 5500

Serial:

8 inch

Chamber 1: Tin 101 wide body with shutter

Chamber 2: AlCu

Chamber 3: AlCu

Chamber 4: Tin 101 wide body with shutter

Chamber 5 : pastewafer

ChamberA: pre-clean

Chamber D : degas

Cryo pump cti

Cryo compressors: 8510, 9600, 9600