1994 TEL Clean Track Mk VII - 150mm Track

Wafersize: 150mm

200mm convertible: Yes

Dimensions & weight estimates:

Mainframe dim (cm): 345 x 140 x 182

Mainframe weight (kg):

Bypack1 dim (cm): 140 x 100 x 210

Bypack1 weight (kg):

The tool, inclusive photoresist pumps, and the bypack units have been flushed and cleaned with solvent/DI water, and dry cleaned with CCA. The solvent lines (HMDS, Resist, thinner, developer have been disconnected from the tool), as well as the electric power supply lines. The bypacks of the tool are situated in the basement under the fab. The water cooling line and signal cables are still connected between process unit and bypack. Decommissioning was done by trained Litho technicians.

Specific Model: MD713106

Wafer size: 6 inch

Wafer type: Jeida flat

Wafer flow:

Number coater/developer modules: 1C/2D

InLine system: Yes

Resists / Coaters: 2 ( IDI)

E2 Develop nozzle kits: 2

RRC Pumps & kits:

Dual‐stream nozzles / Developer: NA

Solvent & developer auto supply systems: Yes

Temperature / Humidity controller: Yes

Configuration/layout of each block:

GEM: yes

AVG:

HMDS Bubblers: Venturi

Power supply: 208 V, 3 Phase, AC Transformer:

Vintage: 1994

Missing parts: none

Defected parts: none