1994 TEL Clean Track Mk VII - 150mm Track

TEL Clean Track Mk VII - Track

Vintage: 1994

Wafersize: 150mm

200mm convertible: Yes

Dimensions & weight estimates:

Mainframe dim (cm): 345 x 140 x 182

Mainframe weight (kg):

Bypack1 dim (cm): 140 x 100 x 210

Bypack1 weight (kg):

Bypack2 dim (cm): 75 x 150 x 85

Bypack2 weight (kg):

Tool status : The tool, inclusive photoresist pumps, and the bypack units have been flushed and cleaned with solvent/DI water, and dry cleaned with CCA. The solvent lines (HMDS, Resist, thinner, developer have been disconnected from the tool), as well as the electric power supply lines. The bypacks of the tool are situated in the basement under the fab. The water cooling line and signal cables are still connected between process unit and bypack. Decommissioning was done by trained Litho technicians.

Specific Model: MD713159

Wafer size: 6 inch

Wafer type: Jeida flat

Wafer flow:

Number coater/developer modules: 1C2D

InLine system: Yes

Resists / Coaters: 2 (IDI)

E2 Develop nozzle kits: 2

RRC Pumps & kits:

Dual‐stream nozzles / Developer: no

Solvent & developer auto supply systems: Yes

Temperature / Humidity controller: Yes , not functional

Configuration/layout of each block:

GEM: yes

AVG:

HMDS Bubblers: Venturi

Power supply: 208 V, 3 Phase, AC Transformer:

Vintage: 1994

Missing parts: none

Defected parts:none