2010 Lam Research TCP 9600 SE Etchers Ashers

Still running at a fab.

Working Condition.

Wafer : 6 Inches.

Vintage : 2010.

It's complete with HDD and Software included.

Robot type : Shuttle film collection Shuttle film collection

Software : Classic

Materials etched : Metal

List of process gases：CL2, BCL3, O2, HE, SF6, N2, CF4

Etch process : Metal Etching.

Contains two chambers : One for Etching : A glue remover.

Containing molecular sieve contains two chambers : One for Etching : One for glue remover.