2005 SEMITOOL Equinox
2005 SEMITOOL Equinox
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Description
Configuration
- 4 Plating Chambers
- 2 Preclean / SRD Chambers
- Genmark Radial Robot
- 1 Tank Ultrasonic Level Sensor
- ARU Interface
- Levitronix Pumps
- Surpass Flow Meters
- Pall 10” Filter Housings (Plating Cells)
- Pall 4” Filter (Prewet Tank)
- Sample Port
- Fire Suppression System
- Chemical Bulk Fill
- Dynatronix Pro Series Plating Power Supply (4-Cell)
- Tank Heat Exchange Connections
- Power: 208VAC, 80A, 50/60Hz
Specifications
Manufacturer | SEMITOOL |
Model | Equinox |
Year | 2005 |
Condition | Used |
Stock Number | em1636 |
WAFER SIZE | 6" |