2011 KLA 2835I

• Wafer Size: 25 Cassette HH, 300 mm • Standard Ducting • Line Cond. 16kVA (was optional need to confirm) • Integrated IDA rack • Coordinate accuracy: 2 micron • Offline recipe suite • Autolight feature • Logic and Memory inspection modes • 3 Polarization Illumination States: X,Y, none • Pixel sizes: 0.20, 0.16, 0.12, 0.09, 0.08 micron • Spectral Modes: • Broad band DUV • Blue band UV • Middle band UV • Deep Band UV 2 • GHI - Line • HI Line • I Line • G Line • VIS • Data Rate: 6.4 GPPS • Auto Defect Classification: 2nd Generation IDO-MDAT, threshold and GL, Energy, IMX, NEF on image computer • Algorithms: Array and Random Mode, SAT, Mixed Mode, MDAT, NPA, Partial Die, EECI • XP package • Dual loadport • Additional Information: The option that is missing is called a small pixel option and will limit the sensitivity of the tool as the smallest pixels cannot be used. The option requires magnification tubes.