1995 AMAT Centura 5200 HT EPI

AMAT Centura 5200 EPI is configured onto a 5200 HT . The 5200 HT frame includes a heat exchanger and blower integrated into the upper frame, ensuring efficient thermal management and operational reliability.

Configuration:

• HT mainframe with safety-enhanced door design and noise reduction features
• 200mm
• 2 x EPI/Polycide Chambers (A,D)
• 1 x Cool station
• 4 x Edwards Pumps (Edwards iXH-1220HTX, QDP80+QMB250, QDP40, other QDP + roots)
• Gases:  ( SiH4 ; SiH2Cl2 ; TiCl4 ; GeH4 ; SiH3CH3 ; B2H6 ; PH3, HCl, CH4, H2).

Condition:

Complete and working prior to cease of production

Its still installed, selling as is where is.

Buyer is responsible for the cost of Deinstall, rigging and crating, but our team at Tarasemi is available to manage the process, streamlining the purchase for you.