2002 Mattson Technology ASPEN 2

Wafer Size 200 mm

Fab Section Etch 

Vintage 2002

Asset Description MATTSON ASPEN 2 PHOTORESIST STRIPPING MACHINE

Software Version 5.56E3B

CIM GEM

Process PHOTORESIST STRIPPING MACHINE

Main System MAIN TOOL 1 

GEN RACK 1

Missing/ Faulty Parts/ Accessories List:

LPT (NOT FOR SALE)

DRY PUMPS (NOT FOR SALE)