1997 HITACHI S-8820

Metrology

8"

Frame

FEB length measurement

Broken

Date of manufacture Sep-97

8"

High-resolution FEB length measuring device

Overview of relevant items such as chambers, Smiff interface, gases, etc See attached sheet of "Configuration"

Warehouse or Clean Room Warehouse

Clean Room Options: Running production, Idle, Decontaminated, Decomissioned

Warehouse Options: Unpacked, Packed, Crated Packed

Working Tool or Not Working Tool?

If not working, when last time was working? Not working

Last time of working: 26-Dec-11

What is broken

Approximate cost to repair

Missing Parts (pls itemize in seperate worksheet) There are many missing parts.

Detail of missing parts is unknown.