Brooks MX800 Transport Module with Magnatran MAG 7 Robot

Brooks MX800 Transport Module with Magnatran MAG 7 Robot

Working condition prior to de-install

Came from tier 1 fab in Europe.

-Brooks Magnatran 7 Robot Model 003-1600-27

-Brooks Facet Node Breakout 002-2692-01

-Brooks LoadLock Node 002-2901-01

-VAT gate valves

-Loadlock turbo pumps: Pfeiffer TMH 261