2001 Varian E220 EHPI 200KeV Implanter

E220 EHPi, 8"

Vintage: 2001

DI Cart: EHPI, B-Pure filter

Chamber A (DPN): Aluminum material

Gas box: 4-Sicks HP SDS2

Missing parts: TPLM Board Platen

Status: Installed

Sold “as is, where is” in Europe

****pumps not included****