1999 Mattson Aspen II ICP

Main frame. Cables 64*76*78

AC power rack 26*18*66

Utility box 25*20*75

RF rack 22*26*55

Chiller. Cables 33*25*55

Transformer 24*24*30

Parts box-1 : spare parts, Tool Manual 28*20*16

Parts box-2 : spare parts, Tool Manual 28*20*16

Parts box-3 : spare parts, Tool Manual 28*20*16

WAFER SIZE: 8"

SMIF : NONE

PROGRESS TYPE: PR ASHER

CHAMBER POSITION: BACK CHAMBER : ICP ASHER (Lower stage light etch) SIDE CHAMBER : ICP ASHER

ROBOT : MATTSON STANDARD DUAL ARM

BACK CHAMBER  

-PROCESS : PR ASHER  

-TUBE MATERIAL : QUARTZ  

-RF GENERATOR : AE, RFPP 30S  

-RF MATCHER : TRAZAR, AMU10D-3

-PRESSURE GUAGE : CMLB-11506  

-THROTTLE VALVE : MDV018  

-THROTTLE VALVE CONTROLLER : ACX120103  

-TEMP CONTROLLER : MIC 2000, PARTLOW  

-GAS BOX  

GAS-1 : O2, 10000SCCM  

GAS-2 : O2, 200SCCM  

GAS-3 : CF4, 50SCCM  

GAS-4 : H2/N2, 3000SCCM

SIDE CHANBER  

-PROCESS : PR ASHER  

-TUBE MATERIAL : QUARTZ  

-RF GENERATOR : AE, RFPP 30S  

-RF MATCHER : TRAZAR, AMU10D-3  

-PRESSURE GUAGE : CMLB-11506  

-THROTTLE VALVE : MDV018  

-THROTTLE VALVE CONTROLLER : ACX120103  

-TEMP CONTROLLER : MIC 2000, PARTLOW  

-GAS BOX  

GAS-1 : O2, 5000SCCM  

GAS-2 : O2, 200SCCM  

GAS-3 : CF4, 300SCCM  

GAS-4 : H2/N2, 3000SCCM

DRY PUMP : None

CHILLER : EXH-1004 ( RISSHI CO LTD )-BACK CHAMBER ONLY

UTILITY BOX : NOT OEM, PCW DISTRIBUTION

TRANSFORMER : NOT OEM,200VAC=>100VAC