2015 AMAT Producer GT

FRONTIER - Etch for Junctions

CHA-SiCoNi, CHB-Frontier, CHCFrontier

Tool Status Connected

Wafer Size 300 mm

Fab Section Thin Film

Software Version B5594_B8.10_31

Process CHA-SiCoNi, CHB-Frontier, CHCFrontier

Main System SiCoNi PME 1

Main System Producer GT System - R&D Confguration 1

Main System Frontier SMR Nitride 1

Factory Interface FOUP 3

Options System 4 HX and 2 chillers 1

Options System SiConi GP-A 1

Options System Frontier Gas Panels Positions B and C 1