2014 Tokyo Electron Ltd. ALPHA-303i Anneal
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Description
2014 Tokyo Electron Ltd. ALPHA-303i Anneal
Production wafers:75
Process Gas: H2(F.S:15slm), O2(F.S:20slm), N2(F.S:50slm), DCE(F.S:1slm)
Water generating Type:External Torch
MFC Maker:HITACHI-Metals
MFC Model: FC-D98series
Process Temp:600-1000deg
Specifications
| Manufacturer | Tokyo Electron Ltd. |
| Model | ALPHA-303i Anneal |
| Year | 2014 |
| Condition | Used |
| Stock Number | em1097 |