Veeco spector iontech HBDG ion assist ion beam sputtering system IBAD thin film

This listing is for one of the first veeco spector IBAD systems produced, during the iontech era under the name of HBDG (horizontal beam, dual gun). The system is configured with two 6 cm RF driven ion guns with PBN. The target carousel holds four 5" targets. The 6" deposition stage is water cooled and has both 90-0-90 degrees tilt and rotary. Dry pumping for enhanced deep UV optics. ITAVS controller (everything is set up for manual operation). MKS RGA. Limited testing has been done on the components. No known faults, but offered as-is.