1996 Canon FPA 3000 i4 Stepper

4 units of Canon i4 Steppers for sale, they are like an i11D. (350nm resolution)

Vintages: 3x 1995 1x1996

Configuration: left inline system; Inline with TEL Mark 7-S Coater Developer

8" wafer chuck;

Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping

Coolant will be removed prior shipping

Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

Good Condition