1994 Oxford Plasmalab 100 Plus RIE Etchers Ashers

It's warehoused.

It was in working condition.

Wafer : Set up for 100 mm.

Color the PLC is Black as you can see the photo attached.

Vintage : 1994.

It's complete tool with HDD and Software included.

Some condition issues as follows.

RF match, lower electrode assembly partially disassembled/missing parts. 1 Piece ENI ACG-3B RF generator (does not power up)