Axcelis GSD HE Implanter

Following the rebuild and refurbishment, the tool was assembled and completed FAT in France. Then it was disassembled/cleaned, crated and shipped its current location in Asia. It was un-crated and moved to the cleanroom, but we never proceeded to do the installation. It will save a step, as it does not need to be disassembled/cleaned before crating. The tool was verified to be operational and it successfully performed multi-step implant recipe during FAT. It’s currently set up for 6” and can be converted to 8”.

- 6"

- Wafer can be converted back to 8"

- Refurbished

- Refurbishment of isolation transformer

- All assembly refurbished and fitted with new consumables

- Complete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)

- Chamber and beamline CO2 cleaned and diamond polished to return to as-new condition

- Two new SAC IHC ion sources

- System tested to original equipment manufacturers specification

Replacement of:

- Both front and rear Cyro pumps by the OEM

- Valves, gate valves, and vacuum valves

- Mechanical and booster pumps

- High voltage power supply

- Terminal power supplies (filament, bias, arc, magnet, source magnet)

- All gas box elements

- All water lines and fittings

- Pneumatic lines where required (inspected)

A low pressure H2 upgrade was performed:

- High level of safety: No stored H2, but on demand instant generation

- No gas stock management

- Very simple and easy-going technology

- Beam performances similar to H2 pressure technology

- Fully CE compliant