TEL Act 8 Parts List

Tel Act 8 Parts List

OEM: Kondoh Industries

Part name: PRA/Spinner FFU's

P/N: 2980-091458-11

OEM: Kondoh Industries

Part name: PRA/Spinner FFU's

P/N: 2980-091458-11

Description: Comes With Two Suspension Arms.

OEM: TEL (Tokyo Electron)

Part name: PCH Module 3-23 Precision Chilling Hot Plate

P/N: Unknown

Description: Cables cut, PCW Lines cut. Chamber Up/Down, Cool Arm in/out, Pin Up/Down, Solenoids all missing.

OEM: TEL (Tokyo Electron)

Part name: PCH Module 3-22 Precision Chilling Hot Plate

P/N: Unknown

Description: Cables Cut, PCW Lines Cut, Bottom Cover Missing. PCB Capacitor Loose. Air Lines Cut. Chamber Lid Mounting Screws Missing/ Damaged. Chamber In/Out Solenoid Missing. Pin Up/Down Solenoid Missing.

OEM: TEL (Tokyo Electron)

Part name: PCH Module 3-21 Precision Chilling Hot Plate

P/N: Unknown

Description: Cables Cut/Supply Air Lines Damaged. Chamber Up/Down Speed Controllers Missing. PCW Lines Cut. 1 Chill Arm Wafer Guide Spacer Damaged. Chamber Up/Down, Pin Up/Down Solenoids Missing. Cool Arm In/Out Solenoid Missing.

OEM: TEL (Tokyo Electron)

Part name:  Developer Block (Stripped) ACT 8 Tool

P/N: ACT 8 Tool

Description: ACT 8 developer Dismantled down to Core Chassis.

Chemical Doors & 1 Outer Door Missing.

OEM: TEL (Tokyo Electron)

Part Name: PRA Assembly

P/N: Unknown

Description: PRA Assembly Cables Cut.

OEM: TEL (Tokyo Electron)

Part name: Transition Chill Plate TCP 3-15 & Transition 3-16

P/N: 315 & 316

Description: Pin Master Solenoid Missing. Transition 3-16 Pins Damaged. No Rear Cover.

OEM: TEL (Tokyo Electron)

Part name: Chill Plate CHP 3-17

P/N: 317

Description: Visually O.K, No Rear Cover.

OEM: TEL (Tokyo Electron)

Part name: Chill Plate CHP 3-5

P/N: 3-5

OEM: TEL (Tokyo Electron)

Part name: Chill Plate CHP 3-9

P/N: 3-9

OEM: TEL (Tokyo Electron)

Part name: Chill Plate CHP 3-11

P/N: 3-11

OEM: TEL (Tokyo Electron)

Part name: Low/High Temperature Hot Plate 3-12

P/N: 3-12

OEM: TEL (Tokyo Electron)

Part name: Low/High Temperature Hot Plate 3-13

P/N: 3-13

OEM: TEL (Tokyo Electron)

Part name: Low/High Temperature Hot Plate 3-14

P/N: 3-14

OEM: TEL (Tokyo Electron)

Part name: DEV 3-1 Module

P/N: 3-1

Description: Cup assembly removed. 

E-box and contents removed. All cables and airlines to E-box cut.

Motor, Motor cables cut. Bolts to chuck up/down air cylinder couplings missing.

OEM: TEL (Tokyo Electron)

Part name: DEV 3-2 Module

P/N: 3-2

Description: E-box and contents removed. 

All cables and airlines to E-box cut.

OEM: TEL (Tokyo Electron)

Part name: Dev 3-3 Module

P/N: 3-3

Description: E-box and contents removed. 

All cables and airlines to E-box cut.

OEM: TEL (Tokyo Electron)

Part name: Dev 3-4 Module

P/N: 3-4

Description: E-box and contents removed. 

All cables and airlines to E-box cut.

OEM: N/A

Part name: PRA/Spinner Driver Box

P/N: Unknown

Description: Spinner Power Cables Present. 

Other Cables Cut/Missing.

OEM: Unknown

Part name: Metal Parts, Screws & Bolts, Brackets, & Clip

P/N: Unknown

Description: 1 x Collection of Miscellaneous Metal Parts, Screws & Bolts, Brackets & Jubilee Clip.

OEM: Unknown

Part name: Fluid/Gas Lines

P/N: Unknown

Description: 1 x Box of Miscellaneous Fluid/Gas Lines.

OEM: N/A

Part name: Miscellaneous Electrical Cables

P/N: N/A

Description: 2 x Boxes of Miscellaneous Electrical Cables.

OEM: TEL (Tokyo Electron)

Part name: Electrical Cables & Piping Bundle

P/N: N/A

Description: 2 Cables Cut At DEV Block End.

OEM: TEL (Tokyo Electron)

Part name: EIF Cable

P/N: N/A

Description: Some Damage To Exterior Insulation.

OEM: TEL (Tokyo Electron)

Part name: Spinner Partitions

P/N: N/A

OEM: TEL (Tokyo Electron)

Part name: Chemical Area Inner Doors

P/N: N/A

OEM: TEL (Tokyo Electron)

Part name: Spinner Doors

P/N: N/A

OEM: TEL (Tokyo Electron)

Part name: Developer Block Rear Utilities Panel

P/N: N/A

Description: All Gauges & Regulators Present. 

2 PCW 1/4 Turn Valves Missing.

OEM: Panasonic

Part name: PRA Motor Drivers For X1, X2, X3 and Z Axis

P/N: MSD261Y81

OEM: TEL (Tokyo Electron)

Part name: Leak Sensors

P/N: N/A

Description: Leak Sensors x 6 (2 for Chemical Area, 1 per Dev Module).

OEM: Sanyo Denki

Part name: DC Mini Ace 25 (Brushless) Fan

P/N: 109P0924H4D01

Description: 4 x Fans

OEM: TEL (Tokyo Electron)

Part name: Dev 3-1 Exhaust Assembly To Facilities

P/N: 3-1

OEM: TEL (Tokyo Electron)

Part name: Dev 3-2 Exhaust Assembly To Facilities

P/N: 3-2

OEM: TEL (Tokyo Electron)

Part name: Dev 3-3 Exhaust Assembly To Facilities

P/N: 3-3

OEM: TEL (Tokyo Electron)

Part name: Dev 3-4 Exhaust Assembly To Facilities

P/N: 3-4

OEM: TEL (Tokyo Electron)

Part name: Dev 3-1 Dispense Line/Dispense Valves/Water Jacket - Chemical Area Assembly

P/N: 3-1

OEM: TEL (Tokyo Electron)

Part name: Dev 3-2 Dispense Line/Dispense Valves/Water Jacket - Chemical Area Assembly

P/N: 3-2

OEM: TEL (Tokyo Electron)

Part name: Dev 3-3 Dispense Line/Dispense Valves/Water Jacket - Chemical Area Assembly

P/N: 3-3

OEM: TEL (Tokyo Electron)

Part name: Dev 3-4 Dispense Line/Dispense Valves/Water Jacket - Chemical Area Assembly

P/N: 3-4

OEM: Yaskawa Electric

Part name: Dev 3-1 Spinner Motor Driver

P/N: O/N 097515-1-84

Description: AC Input:         AC Output:

Volts: 200-230    Volts: 0-230 

Hz: 50/60        Phase: 3

Phase: 1         Amps: 1.22

Amps: 4.2        KW (HP): 0.2 (0.26)

OEM: Yaskawa Electric

Part name: Dev 3-2 Spinner Motor Driver

P/N: O/N 097515-1-82

Description: AC Input:         AC Output:

Volts: 200-230    Volts: 0-230 

Hz: 50/60        Phase: 3

Phase: 1         Amps: 1.22

Amps: 4.2        KW (HP): 0.2 (0.26)

OEM: Yaskawa Electric

Part name: Dev 3-3 Spinner Motor Driver

P/N: O/N 097515-1-91

Description: AC Input:         AC Output:

Volts: 200-230    Volts: 0-230 

Hz: 50/60        Phase: 3

Phase: 1         Amps: 1.22

Amps: 4.2        KW (HP): 0.2 (0.26)

OEM: Yaskawa Electric

Part name: Dev 3-4 Spinner Motor Driver

P/N: O/N 097515-1-36

Description: AC Input:         AC Output:

Volts: 200-230    Volts: 0-230 

Hz: 50/60        Phase: 3

Phase: 1         Amps: 1.22

Amps: 4.2        KW (HP): 0.2 (0.26)

OEM: TEL (Tokyo Electron)

Part name: PCH Air Purge Flow Meter/Regulator

P/N: N/A

OEM: TEL (Tokyo Electron)

Part name: Dev 3-X Dispense Valve Solenoid Block

P/N: N/A

OEM: TEL (Tokyo Electron)

Part name: Level 1 / Level 2 Safety Interlock Defeat Switches

P/N: 3-2 & 3-4

Description: Connectors For Panel I/O Board Missing.

OEM: TEL (Tokyo Electron)

Part name: Dev 3-1/3 Spin Stop & Arm Pause Switches

P/N: 3-1 & 3-3

Description: 2 x Spin Stop, 1 x Arm Pause.

OEM: TEL (Tokyo Electron)

Part name: Dev 3-1/3 Chuck Vacuum Gauges

P/N: 3-1 & 3-3

Description: Connectors For Panel I/O Board Missing.

OEM: TEL (Tokyo Electron)

Part name: Dev 3-2/4 Spin Stop Switches

P/N: 3-2 & 3-4

Description: Connectors For Panel I/O Board Missing.

OEM: TEL (Tokyo Electron)

Part name: Dev 3-2/4 Chuck Vacuum Gauges

P/N: 3-2 & 3-4

Description: Connectors For Panel I/O Board Missing.

OEM: TEL (Tokyo Electron)

Part name: Dev 3-3 Exhaust/Drain Interconnect Pipe

P/N: 3-3

OEM: TEL (Tokyo Electron)

Part name: Dev 3-4 Exhaust/Drain Interconnect Pipe

P/N: 3-4

OEM: TEL (Tokyo Electron)

Part name: Dev 3-1 Mist Trap Drain Line To Facilities

P/N: 3-1

OEM: TEL (Tokyo Electron)

Part name: Dev 3-2 Mist Trap Drain Line To Facilities

P/N: 3-2

OEM: TEL (Tokyo Electron)

Part name: Dev 3-3 Mist Trap Drain Line To Facilities

P/N: 3-3

OEM: TEL (Tokyo Electron)

Part name: Dev 3-4 Mist Trap Drain Line To Facilities

P/N: 3-4

OEM: TEL (Tokyo Electron)

Part name: Dev 3-X Dev Solution/Motor Flange Cooling Water Temp Sensors x 4

P/N: Dev 3-X

Description: Connectors To Analogue Board Cut.

OEM: TEL (Tokyo Electron)

Part name: Dev 3-1 Dispense Line/Water Jacket H Nozzle Assembly, Dev 3-1 Exhaust/Drain Manifold - Module Area

P/N: 3-1

Description: 1 x (Dev 3-1 Dispense Line/Water Jacket H Nozzle Assembly)

Additional External Cleaning Of Water Jacket Required. 

2 x (Dev 3-1 Exhaust/Drain Manifold - Module Area)

OEM: TEL (Tokyo Electron)

Part name: Dev 3-2 Dispense Line/Water Jacket H Nozzle Assembly, Dev 3-2 Exhaust/Drain Manifold - Module Area

P/N: 3-2

Description: 1 x (Dev 3-2 Dispense Line/Water Jacket H Nozzle Assembly) 

2 x (Dev 3-2 Exhaust/Drain Manifold - Module Area)

OEM: TEL (Tokyo Electron)

Part name: Dev 3-3 Exhaust/Drain Manifold - Module Area

P/N: 3-3

OEM: TEL (Tokyo Electron)

Part name: Dev 3-4 Exhaust/Drain Manifold - Module Area

P/N: 3-4

OEM: TEL (Tokyo Electron)

Part name: Dev 3-2 Dispense Line/Water Jacket H Nozzle Assembly

P/N: 3-2

OEM: TEL (Tokyo Electron)

Part name: Dev 3-3 Dispense Line/Water Jacket H Nozzle Assembly

P/N: 3-3

OEM: TEL (Tokyo Electron)

Part name: Dev 3-4 Dispense Line/Water Jacket H Nozzle Assembly

P/N: 3-4

OEM: TEL (Tokyo Electron)

Part name: Dev 3-1 Exhaust Duct/Auto Damper/Manual Damper/Mist Trap

P/N: 3-1

OEM: TEL (Tokyo Electron)

Part name: Dev 3-2 Exhaust Duct/Auto Damper/Manual Damper/Mist Trap Assembly

P/N: 3-2

OEM: TEL (Tokyo Electron)

Part name: Dev 3-3 Exhaust Duct/Auto Damper/Manual Damper/Mist Trap Assembly

P/N: 3-3

OEM: TEL (Tokyo Electron)

Part name: Dev 3-4 Exhaust Duct/Auto Damper/Manual Damper/Mist Trap Assembly

P/N: 3-4