2022 Novellus/ LAM Concept Two Speed NExT CVD 8"

- Wafer Shape: Notch

- SMIF Interface: Yes

- Cassette Loader: LPI 2200

- Loadlock Indexer Robot: Indexer II

- PEC slot: MPS with one cool station

- Main power distributer: PDP

- System Main Power: 3￠5Wires 208V

- System UPS Power: Yes

- Loadlock Baratron Model: MKS

- Split Insert: Yes

- Slit Valve Type: SMC L-Motion

- TM Turbo Pump Model: Pfeiffer TC 400 E74

- TM Throttle Valve Model: MKS

- TM Baratron Model: MKS

- IOC Version: V 4.4

- TM Robot Type: Mag 7 with Center Finder

- TMRobot Blade: Metal

- Wafer sensor: Existence

- EMO's: Push Button/turn to release

- Front Monitor: 15 inch

- Software Revision: 5.502 B26

- Signal Tower: Yes

- Module Controller: MC4X

- Host Interface: SECS / GEM

DLCM Gas MFC:

- MFC1 Ar/He: 1000sccm Ar / Brooks 5866

- MFC2 Ar/He: 1000sccm Ar / Brooks 5866

- MFC3 Ar/He: 500sccm Ar / Brooks GF120C

Process Module configuration:

- Chamber Type Nanofill

- Chamber Process IMD + Multistep

- Process Clean Type RPC

- Dome Type High Power Dome with Multi Frequency

- ESC Type: Duratek mc Notch 6 Pin

- Nanofill：High Purity ESC Guard Ring: Notch

- Module Controller: MC4X

- Module Turbo Pump: Adixen ATP 2300M

- Manometer 1(10T): MKS

- Throttle Valve: MKS

- Temp Monitoring: NTM Delta with ATC: ATC option

- Manometer 2(20T): MKS

- HF Generator: AE Paramount 6013

- MF Generator: AE Paramount 5KW

- LF Generator: AE Paramount 5KW

- RF Match: AE MERCURY 3013

- Manometer 3(100m): MKS

- IOC Version: V 4.21

- End Point Detector: OES EPD: Verity SD2048XL-T

Heat Exchanger Type: SMC

Dual Clean Injector Kit: RPC with one nozzle

2022 Vintage