2000 Eaton NV GSD 200E / 80 HC Implanter

Eaton GSD200E/80 Highcurrent

• Energy Config: 0 - 80Kv Highcurrent
• Build Year:        2000
• Date of first usage:        begin of year 2001
• Current Condition:        Good
• CE-Conformity:              Yes
• Cryo-Pumps:   CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!!
• Cryo-Compressor:        CTI 9650 Low-Voltage
• Turbo-Pumps: Seiko STP A2203 fully refurbed included!!
• Terminal-Rough-Pump:              without (Edwards Config)
• Endstation Rough-Pump:           without (Edwards Config)
• Wafersize:         200mm
• Disk-Type:         Si-coated Disk fully refurbed included!!
• Wafer-Cooling: no Disk-Chiller included !
• Gasbox:             5-String, 4x Toxic-Low-Pressure
• String1:               PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
• String2:               BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
• String3:               AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
• String4:               SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
• String5:               Argon Carrier gas; MFC Brooks GF120 10sccm-N2
• Disk-Drive:       Direct-Drive
• Dose-Type:       Regular
• Source-Type:   ELS4 IHC-Source without Vaporizer
• Highvoltage-Transformer:          dry
• Light-Tower:     red/yellow/green; no buzzer
• Main-Workstation         SUN Solaris AXI 3HE
• Second-Workstation   without
• Software-Version:         6.13.5.1 (no license included)
• Network:           24port 100MB Ethernet with Cisco Router-Kit
• Cell-Controller:              V6 Type
• Condition          tool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024
• Availability       Immediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers
• Notes:
• Slight corrosion spots on the frame, just a visual matter
• Clean-Room Table on frontside not included
• Original Lower Machine Front Panels not included (below the Table)
• Rough-Pumps not included
• Endstation Flowhood not included
• Disk-Chiller not included
• Modified Plasma-Gun Power-Supply installed(TDK)
• Minor modifications on tool
• No Manual-Set/ no Spares
• If required, tool can be inspected on site