1994 Nikon i10C
1994 Nikon i10C
Contact us for price
Description
Machine Model NSR-2005i10C
Electric source (without/with) NEMA BOX / For (CVCF/UPS) / NEMA Switch(none/1/2)
Chamber Type Maker ASAHI / SENDAI Production date 1994. 1
Model S04
Chamber Size 1950 Chamber EPROM Ver.
SET Temprature Chamber : ℃ LATC(LLTC): ℃ IATC: ℃
Reticle Microscope Fixed ( )/ Variable ( 17.5 mm to 20 mm ) / setting size ( )
Main Software version Computer Type PDP11(73/93) / NEST ( )
ROM Version ST- XY- EP-
PA- WF- CE-
WA- LC- RA-
RL-
HP LASER 5517A / 5517B / 5517C LSA LASER 5mW / 10mW
ITV Camera Nikon Original Type / Nikon New Type / Custom eng. / Other ( )
Wafer Size 2inch / 2.5inch / 3inch / 4inch / 6inch / 8inch
Wafer Condition Sapphire / Silicon / Other( )
OF Detection Type Nikon Original Type / Omron type / Keyence type
Wafer Loader Type Type1 / Type2 (A1 / A3)
Wafer Carrier Table Left / Right / Extra In-line no / yes ( right/left )
Reticle Size 5inch(32mm / 26mm / 18mm) /6inch FIA no / yes
Reticle Library Slot Main : ( 23 ) slot / Ext. LIB ( ) slot
PPD /PD/ Extension LIB PPD ( no/yes ) PD( no/yes ) Extension LIB( no/yes )
Rack Type Normal (Right / Left) / Special
NOTE Monitor Missing
Specifications
Manufacturer | Nikon |
Model | i10C |
Year | 1994 |
Condition | Used |
Stock Number | BM4263 |