1994 Nikon i10C

Machine Model NSR-2005i10C

Electric source (without/with) NEMA BOX  /  For (CVCF/UPS)  /  NEMA Switch(none/1/2)

Chamber Type Maker ASAHI / SENDAI Production date 1994. 1

Model S04

Chamber Size 1950  Chamber EPROM Ver.

SET Temprature Chamber :        ℃       LATC(LLTC):      ℃ IATC:              ℃

Reticle Microscope Fixed (     )/ Variable ( 17.5  mm to 20  mm ) / setting size (       )

Main Software version Computer Type PDP11(73/93) / NEST (    )

ROM Version ST- XY- EP-

PA- WF- CE-

WA- LC- RA-

RL-

HP LASER 5517A / 5517B / 5517C LSA LASER 5mW / 10mW

ITV Camera Nikon Original Type / Nikon New Type / Custom eng. / Other (            )

Wafer Size 2inch / 2.5inch / 3inch / 4inch / 6inch / 8inch

Wafer Condition Sapphire / Silicon / Other(            )

OF Detection Type Nikon Original Type / Omron type / Keyence type

Wafer Loader Type Type1 / Type2 (A1 / A3)

Wafer Carrier Table Left / Right / Extra In-line no / yes ( right/left )

Reticle Size 5inch(32mm / 26mm / 18mm) /6inch FIA no / yes

Reticle Library Slot Main : (    23    ) slot / Ext. LIB (       ) slot

PPD /PD/ Extension LIB PPD ( no/yes )         PD( no/yes )      Extension LIB( no/yes )

Rack Type Normal (Right / Left)  /  Special

NOTE Monitor Missing