2001 TEL Unity Me 8555 sss

Dry etch

8"

Process: oxide

Configuration: 3ch:Oxide

Status: packed

Not working tool: there are missing parts

Missing Parts:

Part name

Potential Part Number General Description

Floppy drive Floppy drive

1D86-023244-14 MO drive communication cable

1D86-023248-15 MO drive power cable

1D80-001496-14 Front monitor

1D80-001496-14 Maintenance controller

1D10-314636-12 Force inlet cover

1810-329468-12 Slit gate valve body

046-001311-1 Signal tower

1D80-004078-11 ECC power supply

ECC rack boards ECC rack boards

1D80-004121-12 TOP match

1D80-004982-1* Matcher controller

1810-121864-11 ESC

1D80-005605-12 Process chamber manometer

1D80-004407-11 Back pressure controller (center)

1D80-004407-11 Back pressure controller (Edge)

036-005057-1 ATM Sensor

1D81-000486-11 Pressure controller(PB-6)

1D81-000486-11 Pressure controller(PB-6)

1D10-350848-11 Card rack acrylic cover

017-005557-1 TOP chiller hose

1D10-410483-11 TOP RF cable support (main unit)

020-001089-1 TOP RF cable support screw

1D80-004539-11  Foreline valve for turbo pump exhaust

1810-430592-11 UV cut film for side endpoint windows

040-002527-1 Unit BOX lower part FAN

1D81-000099-J5 MAIO board

1D81-000099-J5 MAIO board

1D80-003894-12 Combination gauge

1D80-004695-11 Filtering for combination gauge

027-003542-1 O-ring for combination gauge

1D80-004122-12 BOT match

1D80-005607-12 Manometer for self-check

1D81-000096-B4 GAS board (1)

012-008460-1 Air operating valve in GAS BOX (G5)

1D80-003246-1* MLT DC BOX200

1D80-003054-13 TOP RF generator

1D80-003143-12 BOT RF generator

1D81-000405-13 ILK board

1D81-00000921B IO board

1D08-000098-13 DIO board

1D08-000096-15 GAS board

1D08-000096-15 GAS board

1D80-004816-14 VAT valve Assy

UPS UPS

MO drive MO drive

1D80-004876-11 Pre-alignment Hoist unit

INR-497(SMC) Chiller

Tool configuration sheet:

Specification Title UNITY Me 8555sss

Date Last Modified 7/4/2001

System Specification 1

System Overview

General Information

Fab

Location

Technology Oxide Etch

Platform Type Me

Fab Tool ID CWDE-TM-06

Software Revision Ver 1.00

Wafer Specification

Wafer Size 200mm

Wafer Shape

SMIF Interface NO

Chamber Type/Location

Process chamber 1 SCCM OXIDE LD TYPE

Process chamber 2 SCCM OXIDE LD TYPE

Process chamber 3 SCCM OXIDE LD TYPE

Cassette chamber Wide Type Slot 25 Slot pitch 1/4 inch Dummy wafer unloading 4 slots

Transport chamber UNITY Me

System control box ECC controller / TC controller

AC power distribution module 1 Rack

VAC / RF control module 2 Rack

Specific Fab Options

Electrical Requirements Installed Option

Line Voltage 3-phase 4-wire connection VAC200v / Control system single phaseVAC200v

Line Frequency 50/60 Hz

System Safety Equipment

EMO Switch Type Press To Activate,Turn to Release EMO

EMO Guard Ring Yes

System Labels English Only Labels

PC1 Oxide Etch Metal Etch Chamber Options

Chamber Body Aluminum alumite Temperature control range Room temperature ~ 60 ℃

Chamber Orings Armor Crystal / Viton

Manometer Type Leybold CR090 33.25Pa

Throttle Valve VALVE ASSY THROTTLING GATE  65048-PH52-AFR1(VAT)

Upper Chamber Type SCCM UEL Body

Baffle plate 8K

Top cooling plate 320-T15-215-D100

Upper electrode 320-T5*5-215-75(CEL)

Shield ring T5-280

Gap drive Drive mechanism AC servo motor

Upper and lower electrode setting range 15~60mm±0.1mm

ESC Type Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX)

Focus Ring Si(Silicone rubber laying)

Lift Pin Made by Vespel

Temperature control pipe diameter 3/4 inch

Back He controller(Center) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa

Back He controller(Edge) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa

Turbo Pump SEIKO SEIKI STP-A2203W1-U

Turbo Pump Controller SEIKO SEIKI  SCU-A2203W1-U

Bottom Match DAIHEN WMN-30F

Top Match DAIHEN AMN-30C10

PC2 Oxide Etch Metal Etch Chamber Options

Chamber Body Aluminum alumite Temperature control range Room temperature ~ 60 ℃

Chamber Orings Armor Crystal / Viton

Manometer Type Leybold CR090 33.25Pa

Throttle Valve VALVE ASSY THROTTLING GATE  65048-PH52-AFR1(VAT)

Upper Chamber Type SCCM UEL Body

Baffle plate 8K

Top cooling plate 320-T15-215-D100

Upper electrode 320-T5*5-215-75(CEL)

Shield ring T5-280

Gap drive Drive mechanism AC servo motor

Upper and lower electrode setting range 15~60mm±0.1mm

ESC Type Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX)

Focus Ring Si(Silicone rubber laying)

Lift Pin Made by Vespel

Temperature control pipe diameter 3/4 inch

Back He controller(Center) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa

Back He controller(Edge) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa

Turbo Pump SEIKO SEIKI STP-A2203W1-U

Turbo Pump Controller SEIKO SEIKI  SCU-A2203W1-U

Bottom Match DAIHEN WMN-30F

Top Match DAIHEN AMN-30C10

PC3 Oxide Etch Metal Etch Chamber Options

Chamber Body Aluminum alumite Temperature control range Room temperature ~ 60 ℃

Chamber Orings Armor Crystal / Viton

Manometer Type Leybold CR090 33.25Pa

Throttle Valve VALVE ASSY THROTTLING GATE  65048-PH52-AFR1(VAT)

Upper Chamber Type SCCM UEL Body

Baffle plate 8K

Top cooling plate 320-T15-215-D100

Upper electrode 320-T5*5-215-75(CEL)

Shield ring T5-280

Gap drive Drive mechanism AC servo motor

Upper and lower electrode setting range 15~60mm±0.1mm

ESC Type Ceramic ESC (1 body type with groove), Electrostatic wafer clamp Clamping force 6650 Pa, Supply voltage 0 ~ 4kvDC (MAX)

Focus Ring Si(Silicone rubber laying)

Lift Pin Made by Vespel

Temperature control pipe diameter 3/4 inch

Back He controller(Center) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa

Back He controller(Edge) UPC-4WS-C13S(FUJIKIN) 0~13300 Pa

Turbo Pump SEIKO SEIKI STP-A2203W1-U

Turbo Pump Controller SEIKO SEIKI  SCU-A2203W1-U

Bottom Match DAIHEN WMN-30F

Top Match DAIHEN AMN-30C10

Gas Delivery Options Gas Panel Installed Option

Cabinet Exhaust Φ150ｍｍ　-49Ｐａ

SLD Fitting Type Accumulation type

Valve Diaphragm valve MEGA-MINI(FUJIKIN)

Filter TOSHIBA Ceramic CEP-TM-HL-VR-03PB

Regulator VERIFLO SQ-MICRO-30-2P-UPG-6028(P-GAS),

VERIFLO SQ-MICRO-HF-50-2P-UPG-6010(N2)

MFC Horiba Stec SEC-7330MC-UC-800A

Pressure switch MKS 51A-13TCA2BA700

Pressure gauge Nagano Keiki GW35-1Q4

Gas Pallet One Installed Option

Gas Pallet PC1 Metal Etch

GAS1 BLIND -

GAS2 Ar 1000 SCCM

GAS3 CF4 100 SCCM

GAS4 Ar 200 SCCM

GAS5 CHF3 100 SCCM

GAS6 C2F6 50 SCCM

GAS7 C4F6 50 SCCM

GAS8 O2 50 SCCM

GAS9 O2 500 SCCM

GAS10 C4F8 30 SCCM

GAS11 He 300 SCCM

GAS12 BLIND -

Gas Pallet One Installed Option

Gas Pallet PC2 Metal Etch

GAS1 BLIND -

GAS2 Ar 1000 SCCM

GAS3 CF4 100 SCCM

GAS4 Ar 200 SCCM

GAS5 CHF3 100 SCCM

GAS6 C2F6 50 SCCM

GAS7 C4F6 50 SCCM

GAS8 O2 50 SCCM

GAS9 O2 500 SCCM

GAS10 C4F8 30 SCCM

GAS11 He 300 SCCM

GAS12 BLIND -

Gas Pallet One Installed Option

Gas Pallet PC3 Metal Etch

GAS1 BLIND -

GAS2 Ar 1000 SCCM

GAS3 CF4 100 SCCM

GAS4 Ar 200 SCCM

GAS5 CHF3 100 SCCM

GAS6 C2F6 50 SCCM

GAS7 C4F6 50 SCCM

GAS8 O2 50 SCCM

GAS9 O2 500 SCCM

GAS10 C4F8 30 SCCM

GAS11 He 300 SCCM

GAS12 BLIND -

Loadlock/Cassette

Loadlock Type Wide Body Loadlock

Cassette Type Supported Slot 25 Slot pitch 1/4 inch Dummy wafer unloading 4 slots

Wafer Out of Cassette Sensor Yes

Cassette processing Uni-cassette

Peep window Side

Pressure switch LEYBOLD PS113

Pre-alignment Unit

Wafer centering accuracy ±0.2mm

Wafer rotation direction accuracy ±1θ

Mainframe Options

Transfer Chamber

Process Chamber1 Slit Valve V-TEX ROLLCAM GateValve Armor Crystal

Process Chamber2 Slit Valve V-TEX ROLLCAM GateValve Armor Crystal

Process Chamber3 Slit Valve V-TEX ROLLCAM GateValve Armor Crystal

Robot Blade Aluminium

Pressure sensor Convectron gauge

On The Fly Centerfind No

Status Light Tower Yes

Signal Lamp Tower Patrite

Tower Location Upper right part of the operation surface of the main body

Lamp Colors R-G-Y

Fab Interface

ONLINE TEL standard Unity GEM

System Controller

Controller GFCI 30ma GFCI

Cntrlr Electrical Interface Controller Top Feed AC Cables

Controller Exhaust Top

Phase II Facilities Cursor Type Blinking Cursor

Heat Exchanger/Chiller

Low Temp Top Temp INR-497-005(Dual)

Brine(CH1:Top) Galden HT-200 +30℃～+90℃

Brine(CH2:Low) Galden HT-135 -20℃～+60℃

CFC R-404A

Brine hose SUS304 Maximum length: 20m,Maximum height: 7m

Remote Options

Generator Rack Options

PC1 Bias RF Generator DAIHEN WGA-30A(2MHz)

PC1 Top RF Generator DAIHEN AGA-27A3(60MHz)

PC2 Bias RF Generator DAIHEN WGA-30A(2MHz)

PC2 Top RF Generator DAIHEN AGA-27A3(60MHz)

PC3 Bias RF Generator DAIHEN WGA-30A(2MHz)

PC3 Top RF Generator DAIHEN AGA-27A3(60MHz)

Pump Options

Pump Provider EBARA

Pump Interface Type EBARA

Transport Loadloc Chamber Pump A10S

Process Chamber Pump PC1 A10S

Process Chamber Pump PC2 A10S

Process Chamber Pump PC3 A10S