AMAT Centura 11 5200 DPS

Centura II 5200 system Mainframe 200mm notch Phase II facilities Narrow body load locks HP+ Robot Endpoint computer Unknown length controller cables Unknown length remote cables SSS Co emulator Hard & Floppy drives Gas Panel UHP single line drop gas panel Gas pallet for chamber B is missing Remote equipment 60” Generator, AC, & controller racks Pump interface cables unknown length 3 Steelhead heat exchangers 6 Edwards Q series pumps Chamber A DPS+ Metal chamber Standard plunger throttle valve EDTCU with Floating coil MKS 649 backside controller 0.1 torr process manometer 10 torr service manometer STP1303 turbo pump GMW25 and OEM 12B RF generators Chamber B -No chamber- Chamber C ASP + Strip chamber AX2115 Microwave power supply Chamber D DPS+ Poly chamber Standard plunger throttle valve MKS 649 backside controller STP2203 turbo pump 0.1 torr process manometer 10 torr service manometer Atlas 2012 and AGC 6B RF generators Chamber E Single slot cooling chamber Chamber F 200mm Orient chamber Comments: The system appears to be complete, however, it’s hard to tell for sure since some of the parts and cables are secured in boxes. The DPS chambers have obvious corrosion on the bellows and the DPS lower chamber channels that provide the necessary fluid for cooling have significant corrosion.