LAM Alliance 4 9400 SE Oxide Etcher

-Available Gas: Cl2, O2/He, Ar, Cl2, He, CF4, NF3 and He

-8 inch

-Polysilicon

-One process chamber

LAM Alliance 4 questions

1.What gases were ran?

*not running any process on the tool* *from info sheet, gas available is Cl2, O2/He, Ar, Cl2, He, CF4, NF3 and He*

2.How many process chambers come with the unit? *only one process chamber* Can you take more photos?

3.Is the 9400 poly silicon or Oxide? *polysilicon*

4.Confirm wafer size.*8inch*

5.Is it LAM Alliance 4.0 TM + 9400SE PM x 2 + RPM *not sure the details, some info sheet refer to the tool as alliance A4 9400 SE* *RF Gen n/a*

Axcelis questions

*the system never been installed since received from other project site, so no specific details available on the system configuration*

1.How many ion sources come with the unit *no info*

2.Also is the source/s Bernas or Freeman? *no info*

3.Does the ion source come with a vaporizer? *no info*

4.What species did the system run e.g. B, P, As or Sb?, *Ar, BF3, AsH3, PH3* that tells us the level of contamination *no info*

5.Wafer size, AT4 endstation? *6inch*

6.Any upgrades on the system? *no info*

7.Any spares associated with the system? *none*

8.Any documentation of the system? *refurbisher checklist*

9.Model number of analyzer power supply i.e. amps available *no info*

10.Descriptive label on the analyzer magnet showing maximum current rating *no info*

11.Pictures of the system inside and outside

Pumps on the system i.e. description / model number of rotary pumps, diffusion pump and cryopumps *P1 M6 Diffusion pump, P2 & P3 CryoTorr 8, compressor both CTI8510 - based on info sheet (to be verified)*