VSM Thermco 520 4 Stack Horizontal Diffusion Furnace

VSM Thermco 520 4 Stack Horizontal Diffusion Furnace

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Description

This is a used VSM 520 core, suitable for rebuild


The VSM furnace is a copy of a Thermco 5204. 

The loaders are twin rail style, paddle clamps included. 


This is a left hand system. (front door is included, hardware was loose, so door is sitting on the pallet)


This unit is capable of being controlled by ICCI or Semy, or TMX but controller is not included. Provisions for Semy remain


Includes the load station

furnace cabinet

source cabinet

round scavenger


480v 300a 


Each tube level has a 41kva transformer and heating element.


Element bore, 10 inch maximum


150mm processing


Sold as is.


Specifications

ManufacturerVSM
ModelThermco 520 4 Stack Horizontal Diffusion Furnace
ConditionUsed
Stock NumberGOD23082023720223396
WAFER SIZE150mm