1995 Varian 300XP

Wafer Sizes: 6"/150mm

Tool is crated and was in working condition prior to shutdown.Configuration

Extraction PS: Glassmann with External Stack

Accel HV: Glassmann

Diffusion Pump: 1 x Varian Pump

Cryo Pumps: 3 x CT8

Oil Pumps: 3 x 2012 Varian

Incoming CDA Pressure: 100PSI

N2 Pressure: 20 PSI

Toxic MFC controlled system fully operational: 3 nos.

Toxic MFC controlled system faulty: 1 No.

Main Incoming Power: 208VAC/32Kva

OEM Model Description

The 300 XP evolved from the industry-standard Varian 350D medium current implanter, which was the tool of choice during the early 1980's. The 300 XP was introduced in 1986 with process recipe control that assured error-free setups, independent dual end stations with increased reliability and throughput, and improved dosimetry.