ASML PAS5500/300C

8"

Uniformity Measurement

Comment : post patch upgrade

Image Field Size [mm]

x : 22.0 y : 22.0 Diameter : 31.1

Steps

x : 11 y : 11

Measurement Type : Pulse Mode

Pulses : 100

Pulse Frequency [Hz] : 1000

Pulse Energy [mJ] : 10.00

Apply REMA Window : Yes

Load Reticle : N

Illumination Mode : Conventional

Numerical Aperture : 0.57

Sigma Outer : 0.750

Illumination mode name : conventional Version : 1.0.0

Uniformity Measurement Result

Uniformity [%] : 2.85

Logfile : LI/LIUM/waf.14075

Tilt X [%/field] : -0.03 Y [%/field] : -1.14

Overall Average of

Ratio : 1.02 Standard Deviation : 0.02

Intensities Spot Sensor [mW/cm2] : 184.10 Standard Deviation : 3.01

Intensities Energy Sensor [mW/cm2] : 180.08 Standard Deviation : 0.09

Estimated Uniformity from measured data [%]

If corrected for actual tilts : 2.74

If corrected with gradient filter : 3.18

If corrected for tilts and with gradientfilter : 2.89

Total Nr of Laserpulses since Installation [* 10^6] : 15440

Symmetric Uniformity Value [%] : -1.64

Stray Light Measurement

Comment : Uniformity stray light measurement

Image Field Size [mm]

x : 22.0 y : 22.0

Steps

x : 11 y : 11

Apply REMA Window : Yes

Load Reticle : N

Illumination Mode : Conventional

Numerical Aperture : 0.57

Sigma Outer : 0.750

Illumination mode name : conventional Version : 1.0.0

Stray Light Measurement

Maximum Stray Light Number [%] : 2.46

Stray Light Variation [%] : 1.42

Log Files : LI/LIUM/waf.13966, LI/LIUM/waf.13967