1993 LAM TCP9408SE

Tool Status Running Wafers

Wafer Size 200 mm

Fab Section Etch

Asset Description LAM TCP 9400 ETCHER

Software Version Envision 1.6 - 012A

CIM SECS

Process CMOS

Main System LAM TCP 9400 ETCHER 1

Factory Interface SMIF 2

AC Rack 1

PC Pump 1

TCU 4080 1

LL PUMP 1

Heater Controller 1