1993 LAM TCP9408SE

1993 LAM TCP9408SE

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Description

Tool Status Running Wafers

Wafer Size 200 mm

Fab Section Etch

Asset Description LAM TCP 9400 ETCHER

Software Version Envision 1.6 - 012A

CIM SECS

Process CMOS

Main System LAM TCP 9400 ETCHER 1

Factory Interface SMIF 2

AC Rack 1

PC Pump 1

TCU 4080 1

LL PUMP 1

Heater Controller 1

Specifications

ManufacturerLAM
ModelTCP9408SE
Year1993
ConditionUsed
Stock NumberBM4122