Axcelis NV-GSD III

Description Dimension

End station 110x94x92

Analyzer, Power rack 50x37x89

Source teminal 48x69x91

Controller rack 61x91x92

Pallet-1: End station door, Misc parts etc 103x55x22

Pallet-2: Teminal door, Misc parts etc 100x50x24

Pallet-3: Top plate, Hood, Misc parts etc 71x43x26

Pallet-4: Beam door, stage, Misc parts etc 125x54x29

Pallet-5: Front door, Misc parts etc 114x50x17

Pallet-6: Fitter cover 76x48x33

Pallet-7: Fitter 63x66x55

Pallet-8: Stack, Accessories, Controller 47x52x33

Pallet-9: Gas box 42x49x59

Compressor 1 20x29x30

Compressor 2, Rack 20x29x52

Chiller 20x29x29

PC, Monitor rack 27x40x52

SMIF 17x24x75

Bottom plate

End station Front pannels 36x85x4

PROCESS: HIGH CURRENT

MOVING TYPE: DISK TYPE

DRY PUMP : N/A

CRYO PUMP : ON BOARD 250F CRYO PUMP ,ON BOARD 10,ON BOARD 8 

COMPRESSOR : CTI 9600 , CTI 9600

TMP (TURBO PUMP) :STPH - 2000C

CHILLER : RWA-012J-BE07CBD

GAS : AR , BF3 , ARSINE , POSPIN