1999 Mattson AST 2800
1999 Mattson AST 2800
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Description
Description AST SUPER HEAT SYSTEM
Year of Manufacture 1999
Tool Status Connected
Wafer Size 200 mm
Fab Section Thin Film
Asset Description AST SUPER HEAT SYSTEM
Software Version DOS 2.0
CIM GEM
Process RTP
Handler System PRI ALIGNER 1
Options System PRI ROBOT ATM307 1
Specifications
| Manufacturer | Mattson |
| Model | AST 2800 |
| Year | 1999 |
| Condition | Used |
| Stock Number | BM4107 |