Ontrak DSS-200 Series II Double Sided Wafer Scrubber

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Description

  • Cassette to Cassette Handling of up to 200mm Wafers
  • Wet Send Elevator with Enclosure
  • Double Sided Scrub Module
  • Configured for PVA Brushes
  • Single Spin Station – Edge Contact Only
  • Megasonic Scrub Arm with Pre-Tech PT-005J Megasonic Generator
  • IR Drying Lamp
  • Wafer Output Module – Edge Contact Only
  • GEM RS-232 Communication
  • Touch Screen Color CRT Display
  • SPECIAL NOTE: This tool has only been plumbed with DI water. No other liquids have been used.


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Specifications

ManufacturerOntrak
ModelDSS-200 Series II Double Sided Wafer Scrubber
ConditionUsed
Stock NumberGOD23082023720223381